Application of statistical X-ray diffraction theory for study of multilayer systems

Triple-crystal X-ray diffractometry is widely used for the analysis of structural characteristics of single crystals and heteroepitaxial structures. Different theoretical approaches taking into account both coherent and diffuse scattering have been used to analyze the experimental data. Using the formalism of Kato statistical theory of dynamic diffraction, we developed and generalized a theoretical interpretation of different methods of diffractometry of various objects. The goal of this work is to generalize the statistical theory of X-ray diffraction for any structural defects, including both conventional defects (amorphous clusters, dislocation loops, mosaicity, et al.) and foreign nanostructures formed artificially in matrices, for example, quantum dots or quantum wires.