Analysis of the mosaic structure of an ordered (Al,Ga)N layer

The mosaic structure of an (Al,Ga)N layer grown on (0001) sapphire showing natural ordering was studied by high-resolution X-ray diffraction (HRXRD) reciprocal-space mapping. The direction-dependent mosaicity of the layer has been elaborated using maps of symmetrical and asymmetrical reflections. The reciprocal-lattice points show significant broadening depending on the direction in reciprocal space, the diffraction order and the reflection type (fundamental or superstructural). The evaluation followed two paths; (i) a procedure based on the Williamson-Hall plot and (ii) a new approach based on the statistical diffraction theory (SDT). Here, the transformed Takagi equations were implemented for the simulation of the reciprocal-space maps (RSM) for symmetrical and asymmetrical reflections. The reconstruction comprised the mosaic block size, their average rotation angle and the spatial distribution of some components of the microdistortion tensor. The results based on the SDT modelling agree well with those obtained by the Williamson-Hall method, while providing a higher degree of precision and detail.